JPS63199171U - - Google Patents

Info

Publication number
JPS63199171U
JPS63199171U JP8871587U JP8871587U JPS63199171U JP S63199171 U JPS63199171 U JP S63199171U JP 8871587 U JP8871587 U JP 8871587U JP 8871587 U JP8871587 U JP 8871587U JP S63199171 U JPS63199171 U JP S63199171U
Authority
JP
Japan
Prior art keywords
shutter
temperature
liquid nitrogen
shape memory
memory alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8871587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8871587U priority Critical patent/JPS63199171U/ja
Publication of JPS63199171U publication Critical patent/JPS63199171U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP8871587U 1987-06-09 1987-06-09 Pending JPS63199171U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8871587U JPS63199171U (en]) 1987-06-09 1987-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8871587U JPS63199171U (en]) 1987-06-09 1987-06-09

Publications (1)

Publication Number Publication Date
JPS63199171U true JPS63199171U (en]) 1988-12-21

Family

ID=30947056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8871587U Pending JPS63199171U (en]) 1987-06-09 1987-06-09

Country Status (1)

Country Link
JP (1) JPS63199171U (en])

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